Manual Nano- and microelectromechanical systems fundamentals of nano- and microengineering

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Design, optimization, analysis and control topics in nanotechnology ad MEMS courses Abstract: This paper discusses the use of a systems theory, design coverage and control topics in nanotechnology and microelectromechanical systems MEMS courses developed and offered in the College of Engineering in RIT. The multidisciplinary nano and microengineering have accomplished a phenomenal growth over the last twenty years due to the rapid advances in microelectronics, molecular technologies, bulk and surface micromachining, computer-aided-design CAD , etc. Recent fundamental and applied research and developments in molecular electronics and informatics have been notably contributed to the current progress.

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Lyshevski, Sergey Edward. Physical Description p. Published Boca Raton, Fla. Language English. Author Lyshevski, Sergey Edward.

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Edition 2nd ed. Series Nano- and microscience, engineering, technology, and medicine series ; 8 Nano- and microscience, engineering, technology, and medicine series ; 8. Subjects Microelectromechanical systems. Summary "Significantly revised to reflect both fundamental and technological aspects, this second edition introduces the concepts, methods, techniques, and technologies needed to solve a wide variety of problems related to high-performance nano- and microsystems. The book is written in a textbook style and now includes homework problems, examples, and reference lists.

It is designed to satisfy the growing demands of undergraduate and graduate students, researchers, and professionals in the fields of nano- and microengineering, and to enable everyone to contribute to the nanotechnology revolution.

A Brief Introduction to MEMS and NEMS

Contents 1. Nano- and microscience, engineering, and technology 2. Nano- and microscale systems, devices, and structures 3. Nano- and microsystems : classification and consideration 4.


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Fundamentals of microfabrication and MEMS fabrication technologies 5. Modeling of micro- and nanoscale electromechanical systems and devices 7. Classification and Consideration.

Chapter 7 Quantum Mechanics and Its Applications. Chapter 8 Molecular and Carbon Nanoelectronics.

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Chapter 1 Nano and Microscience Engineeringand Technology.